Display apparatus and method of manufacturing the same

ABSTRACT

A display apparatus and a method of manufacturing the same are provided. According to an embodiment, a display apparatus includes: a substrate; a thin-film transistor located on the substrate; and a buffer layer, a conductive layer, and an insulating layer sequentially located from the substrate between the substrate and the thin-film transistor, and a thickness of the insulating layer is less than a thickness of the buffer layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.16/203,323, filed on Nov. 28, 2018, which claims priority to and thebenefit of Korean Patent Application No. 10-2018-0046293, filed on Apr.20, 2018 in the Korean Intellectual Property Office, the entiredisclosure of each of which is incorporated herein by reference.

BACKGROUND 1. Field

Aspects of embodiments of the present disclosure relate to a displayapparatus and a method of manufacturing a display apparatus.

2. Description of the Related Art

In general, a display apparatus includes a display device and electronicdevices for controlling an electrical signal applied to the displaydevice. The electronic devices include a thin-film transistor (TFT), astorage capacitor, and a plurality of wirings.

In order to accurately control whether a display device emits light anda degree of light emission, studies for improving characteristics ofthin-film transistors electrically connected to a display device havebeen actively conducted.

SUMMARY

According to an aspect of embodiments of the present disclosure, adisplay apparatus includes a thin-film transistor having improvedcharacteristics, and a method of manufacturing the display apparatus isprovided.

Additional aspects will be set forth, in part, in the description whichfollows and, in part, will be apparent from the description, or may belearned by practice of the presented embodiments.

According to one or more embodiments, a display apparatus includes: asubstrate; a thin-film transistor located on the substrate; and a bufferlayer, a conductive layer, and an insulating layer sequentially locatedfrom the substrate between the substrate and the thin-film transistor,wherein a thickness of the insulating layer is less than a thickness ofthe buffer layer.

The thickness of the insulating layer may be from about 30 Å to about 50Å.

The thickness of the insulating layer may be from about 1/600 to about1/200 of the thickness of the buffer layer.

The conductive layer may include a material, and the insulating layermay include an oxide AOx of the material, where A is the material and xis a positive number.

The material may include at least one selected from the group consistingof aluminum (Al), tin oxide (SnO), calcium (Ca), and magnesium (Mg), andthe oxide AOx may include at least one selected from the groupconsisting of Al₂O₃, SnO₂, CaO, and MgO.

The thin-film transistor may include: a semiconductor layer located onthe insulating layer and including a source region, a drain region, anda channel region; a gate insulating layer covering the semiconductorlayer; and a gate electrode located on the gate insulating layer tooverlap the channel region of the semiconductor layer, wherein athickness of the gate insulating layer is greater than the thickness ofthe insulating layer.

The display apparatus may further include an organic light-emittingdevice connected to the thin-film transistor and including a pixelelectrode, an intermediate layer including an organic emission layer,and a counter electrode.

The substrate may include a first flexible substrate, a first barrierlayer, a second flexible substrate, and a second barrier layer that aresequentially stacked.

According to one or more embodiments, a display apparatus includes: asubstrate including a first flexible substrate, a first barrier layer, asecond flexible substrate, and a second barrier layer that aresequentially stacked; a thin-film transistor located on the substrate;and a conductive layer and an insulating layer sequentially located fromthe second barrier layer between the second barrier layer and thethin-film transistor, wherein a thickness of the conductive layer isfrom about 30 Å to about 100 Å, and a thickness of the insulating layeris from about 30 Å to about 50 Å.

The conductive layer may include a material, and the insulating layermay include an oxide AOx of the material, where A is the material and xis a positive number.

The material may include at least one selected from the group consistingof aluminum (Al), tin oxide (SnO), calcium (Ca), and magnesium (Mg), andthe oxide AOx may include at least one selected from the groupconsisting of Al₂O₃, SnO₂, CaO, and MgO.

The display apparatus may further include a buffer layer located betweenthe second barrier layer and the conductive layer.

The thin-film transistor may include: a semiconductor layer located onthe insulating layer and including a source region, a drain region, anda channel region; a gate insulating layer covering the semiconductorlayer; and a gate electrode located on the gate insulating layer tooverlap the channel region, wherein a thickness of the gate insulatinglayer is greater than the thickness of the insulating layer.

The thickness of the gate insulating layer may be from about 2000 Å toabout 3000 Å.

According to one or more embodiments, a method of manufacturing adisplay apparatus includes: forming a conductive layer on a substrate;forming an insulating layer having a thickness from about 30 Å to about50 Å on the conductive layer; forming an amorphous silicon layer on theinsulating layer; and forming a crystalline silicon layer bycrystallizing the amorphous silicon layer.

The method may further include: forming a pre-semiconductor layer bypatterning the crystalline silicon layer; forming a gate insulatinglayer on the substrate to cover the pre-semiconductor layer; forming agate electrode on the gate insulating layer to overlap at least a partof the pre-semiconductor layer; and forming a semiconductor layerincluding a source region, a drain region, and a channel region byimplanting dopants into the pre-semiconductor layer by using the gateelectrode as a doping mask.

The conductive layer and the insulating layer may be formed bysputtering, and the amorphous silicon layer may be formed by chemicalvapor deposition.

The conductive layer may include a material, and the insulating layermay include an oxide AOx of the material, where A is the material and xis a positive number.

The material may include at least one selected from the group consistingof aluminum (Al), tin oxide (SnO), calcium (Ca), and magnesium (Mg), andthe oxide AOx may include at least one selected from the groupconsisting of Al₂O₃, SnO₂, CaO, and MgO.

A thickness of the conductive layer may be from about 30 Å to about 100Å.

BRIEF DESCRIPTION OF THE DRAWINGS

These and/or other aspects will become apparent and more readilyappreciated from the following description of some embodiments, taken inconjunction with the accompanying drawings in which:

FIG. 1 is a plan view of a display apparatus according to an embodiment;

FIG. 2 is a cross-sectional view illustrating a part of a displayapparatus according to an embodiment;

FIG. 3 is a cross-sectional view illustrating a part of a displayapparatus according to another embodiment;

FIG. 4 is a cross-sectional view illustrating a part of a displayapparatus according to another embodiment; and

FIGS. 5A through 5D are cross-sectional views sequentially illustratinga method of manufacturing a display apparatus, according to anembodiment.

DETAILED DESCRIPTION

The present disclosure may include various embodiments andmodifications, and embodiments thereof will be illustrated in thedrawings and will be described herein in further detail. Aspects andfeatures of the present disclosure and methods of achieving the aspectsand features will be described more fully with reference to theaccompanying drawings, in which some embodiments are shown. The presentdisclosure may, however, be embodied in many different forms and shouldnot be construed as being limited to the embodiments set forth herein.

Reference will now be made in further detail to some embodiments,examples of which are illustrated in the accompanying drawings. In thedrawings, the same elements are denoted by the same reference numerals,and a repeated explanation thereof may not be provided.

It is to be understood that although the terms “first,” “second,” etc.may be used herein to describe various elements, these elements shouldnot be limited by these terms. These elements are used to distinguishone element from another.

As used herein, the singular forms “a,” “an,” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise.

It is to be further understood that the terms “comprises” and/or“comprising” used herein specify the presence of stated features orcomponents, but do not preclude the presence or addition of one or moreother features or components.

It is to be understood that when a layer, region, or element is referredto as being “formed on” another layer, region, or element, it may bedirectly or indirectly formed on the other layer, region, or element.That is, for example, one or more intervening layers, regions, orelements may be present.

Sizes of elements may be exaggerated for convenience of explanation. Inother words, since sizes and thicknesses of elements in the drawings maybe arbitrarily illustrated for convenience of explanation, the followingembodiments are not limited thereto.

When a certain embodiment may be implemented differently, a specificprocess order may be different from the described order. For example,two consecutively described processes may be performed substantially atthe same time or performed in an order opposite to the described order.

It is to be understood that when a layer, region, or element is referredto as being “connected to” another layer, region, or element, it may bedirectly connected to the other layer, region, or element or one or moreintervening layers, regions, or elements may be present. For example, itis to be understood that when a layer, region, or element is referred toas being “electrically connected to” another layer, region, or element,it may be directly electrically connected to the other layer, region, orelement or one or more intervening layers, regions, or elements may bepresent.

As used herein, the term “and/or” includes any and all combinations ofone or more of the associated listed items. Expressions such as “atleast one of,” when preceding a list of elements, modify the entire listof elements and do not modify the individual elements of the list.

FIG. 1 is a plan view of a display apparatus according to an embodiment.

A plurality of pixels PX including any of various display devices, suchas an organic light-emitting device (OLED), may be arranged on a displayarea DA of a substrate 100. The pixels PX may further include aplurality of thin-film transistors (TFTs) and storage capacitors forcontrolling the display devices. The number of TFTs included in onepixel may vary from one to seven.

Various wirings for transmitting an electrical signal to be applied tothe display area DA may be located on a peripheral area PA of thesubstrate 100. A TFT may also be provided on the peripheral area PA,and, in this case, the TFT located on the peripheral area PA may be apart of a circuit unit for controlling an electrical signal applied tothe display area DA.

The following will be described on the assumption that a displayapparatus includes an OLED as a display device for convenience. However,the present disclosure is not limited thereto, and may be applied to anyof various display apparatuses, such as a liquid-crystal displayapparatus, an electrophoretic display apparatus, and an inorganicelectroluminescent (EL) display apparatus.

FIG. 2 is a cross-sectional view illustrating a part of a displayapparatus according to an embodiment.

Referring to FIG. 2, the display apparatus includes the substrate 100,first and second TFTs T1 and T2 located on the substrate 100, and abuffer layer 111, a conductive layer 121, and an insulating layer 123located between the substrate 100 and the first and second TFTs T1 andT2. In this case, a thickness t2 of the insulating layer 123 may besmall enough for the conductive layer 121 to affect semiconductor layersA1 and A2 of the first and second TFTs T1 and T2. For example, thethickness t2 of the insulating layer 123 may be less than a thicknesst_(b) of the buffer layer 111.

The substrate 100 may be formed of any of various materials, such as aglass material, a metal material, or a plastic material. According to anembodiment, the substrate 100 that may be a flexible substrate mayinclude a polymer resin, such as polyether sulfone (PES), polyacrylate(PAR), polyetherimide (PEI), polyethylene naphthalate (PEN),polyethylene terephthalate (PET), polyphenylene sulfide (PPS),polyarylate, polyimide (PI), polycarbonate (PC), or cellulose acetatepropionate (CAP).

The buffer layer 111 may be located on the substrate 100, and may reduceor prevent penetration of foreign materials, moisture, or external airfrom the bottom of the substrate 100 and may planarize a surface of thesubstrate 100. The buffer layer 111 may include an inorganic material,such as oxide or nitride, an organic material, or a combination of anorganic material and an inorganic material, and may have a single ormulti-layer structure including an inorganic material and an organicmaterial. In an embodiment, a barrier layer (not shown) for reducing orpreventing penetration of external air may be further provided betweenthe substrate 100 and the buffer layer 111. In some embodiments, thebuffer layer 111 may include silicon oxide (SiO₂) or silicon nitride(SiN_(x)). In some embodiments, the thickness t_(b) of the buffer layer111 may be in a range from 1 μm to about 3 μm.

The conductive layer 121 may be located between the buffer layer 111 andthe first and second TFTs T1 and T2. The conductive layer 121 may belocated under the first and second TFTs T1 and T2 to increase themobility of the semiconductor layers A1 and A2 of the first and secondTFTs T1 and T2. That is, carriers of the conductive layer 121 may beinjected into the semiconductor layers A1 and A2 to increase a carrierconcentration of the semiconductor layers A1 and A2.

The insulating layer 123 having a small thickness may be located betweenthe conductive layer 121 and the first and second TFTs T1 and T2. Theinsulating layer 123 may help the semiconductor layers A1 and A2 of thefirst and second TFTs T1 and T2 to be uniformly formed. Also, thethickness t2 of the insulating layer 123 may be small enough for thecarriers of the conductive layer 121 to move through tunneling to thesemiconductor layers A1 and A2.

If the semiconductor layers A1 and A2 are directly formed on theconductive layer 121, a problem may be caused during a process. Forexample, if the semiconductor layers A1 and A2 are directly formed onthe conductive layer 121 by using chemical vapor deposition (CVD), anelectric field balance may be broken due to the conductive layer 121,thereby leading to an arc. In this case, the semiconductor layers A1 andA2 may not be uniformly formed.

However, since the insulating layer 123 having a small thickness isprovided on the conductive layer 121 in the present embodiment, anelectric field balance is not broken when the semiconductor layers A1and A2 are formed, thereby making it possible to uniformly form thesemiconductor layers A1 and A2. Also, the thickness t2 of the insulatinglayer 123 is small enough for the carriers of the conductive layer 121to move to the semiconductor layers A1 and A2, and, thus, the insulatinglayer 123 may not affect an increase in mobility due to the conductivelayer 121.

In some embodiments, the thickness t2 of the insulating layer 123 may bein a range from about 30 Å to about 50 Å. If the thickness t2 of theinsulating layer 123 is less than 30 Å, an electric field imbalance dueto the conductive layer 121 may not be prevented. If the thickness t2 ofthe insulating layer 123 exceeds 50 Å, the carriers of the conductivelayer 121 may not move through tunneling to the semiconductor layers

A1 and A2.

In some embodiments, the thickness t2 of the insulating layer 123 may bein a range from about 1/600 to about 1/200 of the thickness t_(b) of thebuffer layer 111. The buffer layer 111 may reduce or prevent penetrationof external air, may provide a flat top surface, and may have thethickness t_(b) that is greater than the thickness t2 of the insulatinglayer 123.

In some embodiments, a thickness t1 of the conductive layer 121 may bein a range from about 30 Å to about 100 Å. If the thickness t1 of theconductive layer 121 is less than 30 Å, the conductive layer 121 may notincrease the mobility of the semiconductor layers A1 and A2. If thethickness t1 of the conductive layer 121 exceeds 100 Å, the mobility ofthe semiconductor layers A1 and A2 may no longer be increased andcharacteristics of the first and second TFTs T1 and T2 may be degraded.

In some embodiments, when the conductive layer 121 includes a materialA, the insulating layer 123 may include an oxide AOx (x is a positivenumber) of the material A. In this case, the conductive layer 121 andthe insulating layer 123 may be formed by using one target in onechamber. That is, after the conductive layer 121 is formed by using atarget including the material A, the insulating layer 123 may be formedby using the target by injecting oxygen gas into the same chamber. Insome embodiments, the conductive layer 121 and the insulating layer 123may be deposited by using sputtering.

In some embodiments, the conductive layer 121 may include at least oneselected from the group consisting of aluminum (Al), tin oxide (SnO),calcium (Ca), and magnesium (Mg), and the insulating layer 123 mayinclude at least one selected from the group consisting of Al₂O₃, SnO₂,CaO, and MgO.

The first TFT T1 and/or the second TFT T2 may be located on theinsulating layer 123. The first TFT T1 includes the semiconductor layerA1, a gate electrode G1, a source electrode S1, and a drain electrodeD1, and the second TFT T2 includes the semiconductor layer A2, a gateelectrode G2, a source electrode S2, and a drain electrode D2. The firstTFT T1 may be connected to an OLED 300 and may function as a driving TFTfor driving the OLED 300. The second TFT T2 may be connected to a dataline DL and may function as a switching TFT. Although two TFTs are shownin FIG. 2, the present disclosure is not limited thereto. For example,the number of TFTs may vary from one to seven.

In an embodiment, the semiconductor layers A1 and A2 may includeamorphous silicon or polycrystalline silicon. In another embodiment, thesemiconductor layers A1 and A2 may include an oxide of at least onematerial selected from the group consisting of indium (In), gallium(Ga), tin (Sn), zirconium (Zr), vanadium (V), hafnium (Hf), cadmium(Cd), germanium (Ge), chromium (Cr), titanium (Ti), and zinc (Zn). Thesemiconductor layers A1 and A2 may each include a source region and adrain region doped with impurities and a channel region.

The gate electrodes G1 and G2 are located on the semiconductor layers A1and A2 with the first gate insulating layer 112 therebetween. The gateelectrodes G1 and G2 may have a single or multi-layer structureincluding molybdenum (Mo), aluminum (Al), copper (Cu), or titanium (Ti).For example, the gate electrodes G1 and G2 may have a single-layerstructure formed of Mo.

In an embodiment, the first gate insulating layer 112 may includesilicon oxide (SiO₂), silicon nitride (SiN_(x)), silicon oxynitride(SiON), aluminum oxide (Al₂O₃), titanium oxide (TiO₂), tantalum oxide(Ta₂O₅), hafnium oxide (HfO₂), or zinc oxide (ZnO₂). In someembodiments, a thickness t_(i) of the first gate insulating layer 112may be greater than the thickness t2 of the insulating layer 123. Forexample, the thickness t_(i) of the first gate insulating layer 112 maybe in a range from about 2000 Å to about 3000 Å.

A second gate insulating layer 113 may be provided to cover the gateelectrodes G1 and G2. The second gate insulating layer 113 may includeSiO₂, SiN_(x), SiON, Al₂O₃, TiO₂, Ta₂O₅, HfO₂, or ZnO₂. In someembodiments, the second gate insulating layer 113 may have a thicknessthat is greater than the thickness of the insulating layer 123. Forexample, the thickness of the second gate insulating layer 113 may be ina range from about 2000 Å to about 3000 Å.

A first electrode CE1 of a storage capacitor Cst may overlap the firstTFT T1. For example, the gate electrode G1 of the first TFT T1 mayfunction as the first electrode CE1 of the storage capacitor Cst.

In an embodiment, a second electrode CE2 of the storage capacitor Cstoverlaps the first electrode CE1 with the second gate insulating layer113 therebetween. In this case, the second gate insulating layer 113 mayfunction as a dielectric layer of the storage capacitor Cst. In anembodiment, the second electrode CE2 may include a conductive materialincluding Mo, Al, Cu, or Ti, and may have a single or multi-layerstructure including the above material. For example, the secondelectrode CE2 may have a single-layer structure formed of Mo, or mayhave a multi-layer structure formed of Mo/Al/Mo.

In an embodiment, an interlayer insulating layer 115 is formed on theentire surface of the substrate 100 to cover the second electrode CE2 ofthe storage capacitor Cst. The interlayer insulating layer 115 mayinclude SiO₂, SiN_(x), SiON, Al₂O₃, TiO₂, Ta₂O₅, HfO₂, or ZnO₂.

The source electrodes S1 and S2 and the drain electrodes D1 and D2 arelocated on the interlayer insulating layer 115. The source electrodes S1and S2 and the drain electrodes D1 and D2 may include a conductivematerial including Mo, Al, Cu, or Ti, and may have a single ormulti-layer structure including the above material. For example, thesource electrodes S1 and S2 and the drain electrodes D1 and D2 may havea multi-layer structure formed of Ti/Al/Ti.

A planarization layer 118 may be located on the source electrodes S1 andS2 and the drain electrodes D1 and D2, and the OLED 300 may be locatedon the planarization layer 118.

The planarization layer 118 may have a flat top surface such that apixel electrode 310 may be planarized. The planarization layer 118 mayhave a single or multi-layer structure including a film formed of anorganic material or an inorganic material. The planarization layer 118may include benzocyclobutene (BCB), PI, hexamethyldisiloxane (HMDSO), ageneral-purpose polymer, such as polymethyl methacrylate (PMMA) orpolystyrene (PS), a polymer derivative having a phenol-based group, anacrylic polymer, an imide-based polymer, an aryl ether-based polymer, anamide-based polymer, a fluorinated polymer, a p-xylene-based polymer, avinyl alcohol-based polymer, or a blend thereof. In an embodiment, theplanarization layer 118 may include SiO₂, SiN_(x), SiON, Al₂O₃, TiO₂,Ta₂O₅, HfO₂, or ZnO₂. After the planarization layer 118 is formed,chemical mechanical polishing may be performed in order to provide aflat top surface.

In the display area DA of the substrate 100, the OLED 300 is located onthe planarization layer 118. The OLED 300 includes the pixel electrode310, an intermediate layer 320 including an organic emission layer, anda counter electrode 330.

An opening through which any one of the source electrode S1 and thedrain electrode D1 of the first TFT T1 is exposed may be formed in theplanarization layer 118, and the pixel electrode 310 contacts the sourceelectrode S1 or the drain electrode D1 through the opening and iselectrically connected to the first TFT T1.

The pixel electrode 310 may be a light-transmitting electrode or areflective electrode. In some embodiments, the pixel electrode 310 mayinclude a reflective film formed of silver (Ag), magnesium (Mg),aluminum (Al), platinum (Pt), palladium (Pd), gold (Au), nickel (Ni),neodymium (Nd), iridium (Ir), chromium (Cr), or a compound thereof, anda transparent or semi-transparent electrode layer formed on thereflective film. The transparent or semi-transparent electrode layer mayinclude at least one selected from the group consisting of indium tinoxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), indium oxide(In₂O₃), indium gallium oxide (IGO), and aluminum zinc oxide (AZO).

A pixel-defining film 119 may be located on the pixel electrode 310. Thepixel-defining film 119 may define a pixel by having an opening 1190Pcorresponding to each sub-pixel, that is, an opening through which atleast a central portion of the pixel electrode 310 is exposed. Also, thepixel-defining film 119 may prevent or substantially prevent an arcbetween the pixel electrode 310 and the counter electrode 330 byincreasing a distance between an edge of the pixel electrode 310 and thecounter electrode 330. In an embodiment, the pixel-defining film 119 maybe formed of an organic material, such as PI or HMDSO.

In an embodiment, a spacer (not shown) may be located on thepixel-defining film 119. The spacer may prevent or substantially preventdamage to a mask during a mask process needed to form the intermediatelayer 320 of the OLED 300. In an embodiment, the spacer may be formed ofan organic material, such as PI or HMDSO. In an embodiment, the spacerand the pixel-defining film 119 may be formed at the same time by usinga same material. In this case, a halftone mask may be used.

The intermediate layer 320 of the OLED 300 may include the organicemission layer. In an embodiment, the organic emission layer may includean organic material including a fluorescent or phosphorescent materialthat emits red, green, blue, or white light. The organic emission layermay be formed of a low molecular weight organic material or a highmolecular weight material, and functional layers, such as a holetransport layer (HTL), a hole injection layer (HIL), an electrontransport layer (ETL), and an electron injection layer (EIL), may beselectively further located under and over the organic emission layer.In an embodiment, the intermediate layer 320 may be located tocorrespond to each of a plurality of the pixel electrodes 310. However,the present disclosure is not limited thereto, and, for example, theintermediate layer 320 may be located over all the pixel electrodes 310.

The counter electrode 330 may be a light-transmitting electrode or areflective electrode. In some embodiments, the counter electrode 330 maybe a transparent or semi-transparent electrode and may be a metal thinfilm having a small work function including Li, Ca, LiF/Ca, LiF/Al, Al,Ag, Mg, or a compound thereof. In an embodiment, a transparentconductive oxide (TCO) film, such as ITO, IZO, ZnO, or In₂O₃, may befurther located on the metal thin film. The counter electrode 330 may belocated over the display area DA and the peripheral area PA and may belocated on the intermediate layer 320 and the pixel-defining film 119.In an embodiment, the counter electrode 330 may be integrally formed ina plurality of the OLEDs 300 and may correspond to all the pixelelectrodes 310.

As described above, since the display apparatus according to anembodiment includes the conductive layer 121 and the insulating layer123 located between the substrate 100 and the first and second TFTs T1and T2, the display apparatus including the first and second TFTs T1 andT2 having improved mobility may be realized without defects during amanufacturing process.

FIG. 3 is a cross-sectional view illustrating a part of a displayapparatus according to another embodiment. In FIG. 3, the same elementsas those in FIG. 2 are denoted by the same reference numerals, and,thus, a repeated explanation thereof will not be given.

Referring to FIG. 3, the display apparatus may include the substrate100, the first and second TFTs T1 and T2 located on the substrate 100,and the conductive layer 121 and the insulating layer 123 locatedbetween the substrate 100 and the first and second TFTs T1 and T2.

In the present embodiment, the substrate 100 may be formed bysequentially stacking a first flexible substrate 101, a first barrierlayer 102, a second flexible substrate 103, and a second barrier layer104. The buffer layer 111 may be located on the second barrier layer104. In this case, the thickness t2 of the insulating layer 123 may bevery small. For example, the thickness t2 of the insulating layer 123may be less than the thickness t_(b) of the buffer layer 111 or athickness t_(b′) of the second barrier layer 104 (t2<<t_(b), t_(b′)).

The first flexible substrate 101 and the second flexible substrate 103include a material having flexibility and electrical insulation. Forexample, the first flexible substrate 101 and the second flexiblesubstrate 103 may include a polymer resin, such as PES, PAR, PEI, PEN,PET, PPS, PI, PC, or CAP. In an embodiment, the first flexible substrate101 and the second flexible substrate 103 may be formed of flexibleceramic.

In an embodiment, the first barrier layer 102 and the second barrierlayer 104 may include an inorganic material, for example, amorphoussilicon, SiO₂, or SiN_(x). The first barrier layer 102 and the secondbarrier layer 104 may be respectively formed on the first flexiblesubstrate 101 and the second flexible substrate 103 that are vulnerableto air and moisture, may prevent or substantially prevent damage to thefirst flexible substrate 101 and the second flexible substrate 103, andmay reduce or prevent penetration of foreign materials, such as air ormoisture, into the display apparatus. The first barrier layer 102 andthe second barrier layer 104 may have a thickness in a range from about2000 Å to several μm. Accordingly, the thickness t_(b′) of the secondbarrier layer 104 may be greater than the thickness t2 of the insulatinglayer 123. In the present embodiment, the buffer layer 111 may beomitted. When the buffer layer 111 is omitted, the second barrier layer104 may perform the function of the buffer layer 111.

In the present embodiment, the conductive layer 121 and the insulatinglayer 123 may be located between the second barrier layer 104 and thefirst and second TFTs T1 and T2. Also, the thicknesses t1 and t2 of theconductive layer 121 and the insulating layer 123 may be much less thanthe thickness t_(b′) or t_(b) of the second barrier layer 104 or thebuffer layer 111 (t1, t2<<t_(b′), t_(b)).

The conductive layer 121 may be located under the first and second TFTsT1 and T2 to increase the mobility of the semiconductor layers A1 and A2of the first and second TFTs T1 and T2. That is, carriers of theconductive layer 121 may be injected into the semiconductor layers A1and A2 to increase a carrier concentration of the semiconductor layersA1 and A2.

The insulating layer 123 having a small thickness may be located betweenthe conductive layer 121 and the first and second TFTs T1 and T2. Theinsulating layer 123 may help the semiconductor layers A1 and A2 of thefirst and second TFTs T1 and T2 to be uniformly formed. Also, thethickness t2 of the insulating layer 123 may be small enough for thecarriers of the conductive layer 121 to move through tunneling to thesemiconductor layers A1 and A2.

If the semiconductor layers A1 and A2 are directly formed on theconductive layer 121, a problem may be caused during a process. Forexample, if the semiconductor layers A1 and A2 are directly formed byusing CVD, an electric field balance may be broken due to the conductivelayer 121, thereby leading to an arc. In this case, the semiconductorlayers A1 and A2 may not be uniformly formed.

However, since the insulating layer 123 having a small thickness isprovided on the conductive layer 121 in the present embodiment, anelectric field balance is not broken when the semiconductor layers A1and A2 are formed, thereby making it possible to uniformly form thesemiconductor layers A1 and A2. Also, the thickness t2 of the insulatinglayer 123 is small enough for the carriers of the conductive layer 121to move to the semiconductor layers A1 and A2, and, thus, the insulatinglayer 123 may not affect an increase in mobility due to the conductivelayer 121.

In some embodiments, the thickness t2 of the insulating layer 123 may bein a range from about 30 Å to about 50 Å. If the thickness t2 of theinsulating layer 123 is less than 30 Å, an electric field imbalance dueto the conductive layer 121 may not be prevented. If the thickness t2 ofthe insulating layer 123 exceeds 50 Å, the carriers of the conductivelayer 121 may not move through tunneling to the semiconductor layers A1and A2.

In some embodiments, the thickness t1 of the conductive layer 121 may bein a range from about 30 Å to about 100 Å. If the thickness t1 of theconductive layer 121 is less than 30 Å, the conductive layer 121 may notincrease the mobility of the semiconductor layers A1 and A2. If thethickness t1 of the conductive layer 121 exceeds 100 Å, mobility may nolonger be increased and characteristics of the first and second TFTs T1and T2 may be degraded.

In some embodiments, when the conductive layer 121 includes a materialA, the insulating layer 123 may include an oxide AOx (x is a positivenumber) of the material A. In this case, the conductive layer 121 andthe insulating layer 123 may be formed by using one target in onechamber. That is, after the conductive layer 121 is formed by using atarget including the material A, the insulating layer 123 may be formedby using the target by injecting oxygen gas into the same chamber.

In some embodiments, the conductive layer 121 may include at least oneselected from the group consisting of Al, SnO, Ca, and Mg, and theinsulating layer 123 may include at least one selected from the groupconsisting of Al₂O₃, SnO₂, CaO, and MgO.

The first TFT T1 and/or the second TFT T2 may be located on theinsulating layer 123. The first TFT T1 includes the semiconductor layerA1, the gate electrode G1, the source electrode S1, and the drainelectrode D1, and the second TFT T2 includes the semiconductor layer A2,the gate electrode G2, the source electrode S2, and the drain electrodeD2. The first TFT T1 may be connected to the OLED 300 and may functionas a driving TFT for driving the OLED 300. The second TFT T2 may beconnected to the data line DL and may function as a switching TFT.Although two TFTs are provided in FIG. 3, the present disclosure is notlimited thereto. For example, the number of TFTs may vary from one toseven.

As described above, since the display apparatus according to anembodiment includes the conductive layer 121 and the insulating layer123 located between the substrate 100 and the first and second TFTs T1and T2, the display apparatus including the first and second TFTs T1 andT2 having improved mobility may be realized without defects during amanufacturing process.

FIG. 4 is a cross-sectional view illustrating a part of a displayapparatus according to another embodiment. In FIG. 4, the same elementsas those in FIG. 3 are denoted by the same reference numerals, and,thus, a repeated explanation thereof will not be given.

Referring to FIG. 4, the display apparatus may include the substrate100, the first and second TFTs T1 and T2 located on the substrate 100,and the conductive layer 121 and the insulating layer 123 locatedbetween the substrate 100 and the first and second TFTs T1 and T2.

In the present embodiment, the substrate 100 may be formed bysequentially stacking the first flexible substrate 101, the firstbarrier layer 102, the second flexible substrate 103, and the secondbarrier layer 104. In an embodiment, the buffer layer 111 may be locatedon the second barrier layer 104. In this case, the thickness t2 of theinsulating layer 123 may be very small. For example, the thickness t2 ofthe insulating layer 123 may be less than the thickness t_(b) of thebuffer layer 111 or the thickness t_(b′) of the second barrier layer 104(t2<<t_(b), t_(b′)).

Also, in the present embodiment, the display apparatus may furtherinclude an encapsulation layer 400 for sealing the display area DA. Theencapsulation layer 400 may protect the OLED 300 from external moistureor oxygen by covering a display device, etc. located on the display areaDA. In an embodiment, the encapsulation layer 400 may include a firstinorganic encapsulation layer 410, an organic encapsulation layer 420,and a second inorganic encapsulation layer 430.

In an embodiment, the first inorganic encapsulation layer 410 may coverthe counter electrode 330, and may include ceramic, metal oxide, metalnitride, metal carbide, metal oxynitride, In₂O₃, SnO₂, ITO, siliconoxide, silicon nitride, and/or silicon oxynitride. In an embodiment,other layers such as a capping layer may be located between the firstinorganic encapsulation layer 410 and the counter electrode 330. Sincethe first inorganic encapsulation layer 410 is formed along a lowerstructure, a top surface of the first inorganic encapsulation layer 410is not flat, as shown in FIG. 4.

The organic encapsulation layer 420 may cover the first inorganicencapsulation layer 410 to have a flat top surface, unlike the firstinorganic encapsulation layer 410. In further detail, the organicencapsulation layer 420 may be formed such that a portion correspondingto the display area DA has a flat top surface. In an embodiment, theorganic encapsulation layer 420 may include at least one materialselected from the group consisting of acryl, methacryl, polyester,polyethylene, polypropylene, PET, polyethylene naphthalate,polycarbonate, PI, polyethylene sulfonate, polyoxymethylene,polyarylate, and HMDSO.

In an embodiment, the second inorganic encapsulation layer 430 may coverthe organic encapsulation layer 420, and may include ceramic, metaloxide, metal nitride, metal carbide, metal oxynitride, In₂O₃, SnO₂, ITO,silicon oxide, silicon nitride, and/or silicon oxynitride. In anembodiment, the second inorganic encapsulation layer 430 may contact thefirst inorganic encapsulation layer 410 at an edge outside the displayarea DA and may prevent the organic encapsulation layer 420 from beingexposed to the outside.

In an embodiment, since the encapsulation layer 400 has a multi-layerstructure including the first inorganic encapsulation layer 410, theorganic encapsulation layer 420, and the second inorganic encapsulationlayer 430, even when cracks occur in the encapsulation layer 400, thecracks may not be connected between the first inorganic encapsulationlayer 410 and the organic encapsulation layer 420 or between the organicencapsulation layer 420 and the second inorganic encapsulation layer430. Accordingly, a path through which external moisture or oxygen maypenetrate into the display area DA may be prevented or substantiallyprevented.

In an embodiment, various functional layers, such as a touchscreen layerand a polarization film, may be further located on the encapsulationlayer 400, and a capping layer for improving light efficiency may befurther located between the counter electrode 330 and the encapsulationlayer 400.

Although the display apparatus is sealed by the encapsulation layer 400in FIG. 4, the present disclosure is not limited thereto. For example,an organic light-emitting display apparatus may be sealed by providing asealing substrate facing the substrate 100 and attaching the substrate100 and the sealing substrate on the peripheral area PA by using asealing material, such as frit.

FIGS. 5A through 5D are cross-sectional views sequentially illustratinga method of manufacturing a display apparatus, according to anembodiment. The display apparatus of FIG. 2 will be described as anexample.

Referring to FIG. 5A, the buffer layer 111, the conductive layer 121,the insulating layer 123, and a pre-semiconductor layer 130 aresequentially formed on the substrate 100.

In an embodiment, the buffer layer 111 may include SiO₂ or SiN_(x) andmay be formed by using a deposition method such as, but not limited to,CVD or sputtering.

The conductive layer 121 may be formed of a conductive material, such asa metal or a conductive polymer. In some embodiments, the conductivelayer 121 may be formed of Al, Mg, Ca, or SnO. In an embodiment, theconductive layer 121 may be formed by using sputtering. The conductivelayer 121 may be formed to have a thickness in a range from about 30 Åto about 100 Å.

The insulating layer 123 may be formed of an inorganic material and maybe thin enough for carriers of the conductive layer 121 to be tunneled.In an embodiment, the insulating layer 123 may be formed by usingsputtering. In some embodiments, the insulating layer 123 may be formedof Al₂O₃, SnO₂, CaO, or MgO. The insulating layer 123 may be formed tohave a thickness in a range from about 30 Å to about 50 Å.

In an embodiment, when the conductive layer 121 includes a material A,the insulating layer 123 may include an oxide of the material A. In thiscase, the conductive layer 121 and the insulating layer 123 may beformed by using one target in one chamber. That is, after the conductivelayer 121 is formed by using one target, the insulating layer 123 may beformed by injecting oxygen gas.

The pre-semiconductor layer 130 is formed on the insulating layer 123.The pre-semiconductor layer 130 may be formed of amorphous silicon or anoxide semiconductor. In an embodiment, the pre-semiconductor layer 130may be deposited by using CVD. If the insulating layer 123 is notprovided and the pre-semiconductor layer 130 is directly deposited onthe conductive layer 121 by using CVD, an electric field balance may bebroken due to the conductive layer 121 and a uniform film may not beformed. However, in the present embodiment, the insulating layer 123 maybe provided, an electric field imbalance due to the conductive layer 121may be prevented, and the pre-semiconductor layer 130 may be uniformlyformed.

In an embodiment, the pre-semiconductor layer 130 is an amorphoussilicon layer, and the amorphous silicon layer may be formed and thenmay be crystallized by using any of various methods, such as rapidthermal annealing (RTA), solid-phase crystallization (SPC), excimerlaser annealing (ELA), metal-induced crystallization (MIC),metal-induced lateral crystallization (MILC), or sequential lateralsolidification (SLS) to produce a polycrystalline silicon layer.

Next, referring to FIG. 5B, in an embodiment, the semiconductor layersA1 and A2 are formed by patterning the pre-semiconductor layer 130, thefirst gate insulating layer 112 that covers the semiconductor layers A1and A2 is formed on an entire surface of the substrate 100, and the gateelectrodes G1 and G2 are formed on the first gate insulating layer 112.

The first gate insulating layer 112 may include SiO₂, SiN_(x), SiON,Al₂O₃, TiO₂, Ta₂O₅, HfO₂, or ZnO₂, and may be formed by using adeposition method such as, but not limited to, CVD or sputtering.

The gate electrodes G1 and G2 may have a single or multi-layer structureincluding Mo, Al, Cu, or Ti. For example, the gate electrodes G1 and G2may have a single-layer structure formed of Mo. In an embodiment, thegate electrodes G1 and G2 may be formed by forming a metal layer on theentire surface of the substrate 100 and patterning the metal layer. Themetal layer may be formed by using a deposition method such as, but notlimited to, CVD, plasma-enhanced CVD (PECVD), low-pressure CVD (LPCVD),physical vapor deposition (PVD), sputtering, or atomic layer deposition(ALD).

Next, in an embodiment, the semiconductor layers A1 and A2 are formed ofamorphous silicon or polycrystalline silicon, and source regions SA1 andSA2 and drain regions DA1 and DA2 may be formed by implanting n-type orp-type dopants into the semiconductor layers A1 and A2 by using the gateelectrodes G1 and G2 as doping masks. When the semiconductor layers A1and A2 are formed of an oxide semiconductor, a doping process may beomitted.

Referring to FIG. 5C, the second gate insulating layer 113 is formed onthe entire surface of the substrate 100 to cover the gate electrodes G1and G2, and the second electrode CE2 of the storage capacitor Cst isformed on the second gate insulating layer 113.

The second gate insulating layer 113 may include SiO₂, SiN_(x), SiON,Al₂O₃, TiO₂, Ta₂O₅, HfO₂, or ZnO₂, and may be formed by using adeposition method such as, but not limited to, CVD or sputtering.

The second electrode CE2 may be formed on the second gate insulatinglayer 113 to overlap at least a part of the gate electrode G1 thatfunctions as the first electrode CE1 of the storage capacitor Cst. In anembodiment, the second electrode CE2 may be formed by forming a metallayer having a single or multi-layer structure including Mo, Al, Cu, orTi and patterning the metal layer.

Next, the interlayer insulating layer 115 is formed on the entiresurface of the substrate 100 to cover the second electrode CE2, andcontact holes CNT through which the source regions SA1 and SA2 and/orthe drain regions DA1 and DA2 of the semiconductor layers A1 and A2 areexposed are formed. Next, the source electrodes S1 and S2 and/or thedrain electrodes D1 and D2 may be formed by forming a metal layer filledin the contact holes CNT and patterning the metal layer.

The interlayer insulating layer 115 may include SiO₂, SiN_(x), SiON,Al₂O₃, TiO₂, Ta₂O₅, HfO₂, or ZnO₂, and may be formed by using adeposition method such as, but not limited to, CVD or sputtering.

The source electrodes S1 and S2 and the drain electrodes D1 and D2 mayinclude a conductive material including Mo, Al, Cu, or Ti, and may havea single or multi-layer structure including the above material. Forexample, the source electrodes S1 and S2 and the drain electrodes D1 andD2 may have a multi-layer structure formed of Ti/Al/Ti.

Next, referring to FIG. 5D, the planarization layer 118 having a viahole VIA through which the drain electrode D1 of the first TFT T1 isexposed and the OLED 300 located on the planarization layer 118 areformed.

The planarization layer 118 may have a single or multi-layer structureincluding a film formed of an organic material or an inorganic material.In an embodiment, the planarization layer 118 may include BCB, PI,HMDSO, a general-purpose polymer such as PMMA or PS, a polymerderivative having a phenol-based group, an acrylic polymer, animide-based polymer, an aryl ether-based polymer, an amide-basedpolymer, a fluorinated polymer, a p-xylene-based polymer, a vinylalcohol-based polymer, or a blend thereof. In an embodiment, theplanarization layer 118 may include SiO₂, SiN_(x), SiON, Al₂O₃, TiO₂,Ta₂O₅, HfO₂, or ZnO₂. After the planarization layer 118 is formed,chemical mechanical polishing may be performed to provide a flat topsurface.

Next, the pixel electrode 310 is formed on the planarization layer 118.The pixel electrode 310 may be connected to the first TFT T1 through thevia hole VIA formed in the planarization layer 118.

Next, the pixel-defining film 119 having the opening 1190P through whicha central portion of the pixel electrode 310 is exposed is formed. In anembodiment, the pixel-defining film 119 may be formed by applying anorganic material, such as PI or HMDSO, and developing the organicmaterial. Next, the OLED 300 may be formed by forming the intermediatelayer 320 including an organic emission layer and the counter electrode330 on the pixel electrode 310.

As described above, since the display apparatus according to one or moreembodiments includes a conductive layer under a TFT, the mobility of theTFT may be improved. Also, since an insulating layer is located betweenthe conductive layer and the TFT, defects generated during amanufacturing process may be avoided.

However, the scope of the present disclosure is not limited by theaspects and effects described herein.

Although one or more embodiments that may be used as embodiments of thepresent disclosure have been described herein, the embodiments may beimplemented as separate embodiments or combined embodiments. Variouscombinations are possible. For example, the encapsulation layer 400described with reference to FIG. 4 may be applied to the embodiment ofFIG. 2.

While one or more embodiments have been described with reference to thedrawings, it will be understood by one of ordinary skill in the art thatvarious changes in form and details may be made therein withoutdeparting from the spirit and scope of the present disclosure as setforth in the following claims.

What is claimed is:
 1. A method of manufacturing a display apparatus,the method comprising: forming a conductive layer on a substrate;forming an insulating layer having a thickness from about 30 Å to about50 Å on the conductive layer; forming an amorphous silicon layer on theinsulating layer; and forming a crystalline silicon layer bycrystallizing the amorphous silicon layer.
 2. The method of claim 1,further comprising: forming a pre-semiconductor layer by patterning thecrystalline silicon layer; forming a gate insulating layer on thesubstrate to cover the pre-semiconductor layer; forming a gate electrodeon the gate insulating layer to overlap at least a part of thepre-semiconductor layer; and forming a semiconductor layer comprising asource region, a drain region, and a channel region by implantingdopants into the pre-semiconductor layer by using the gate electrode asa doping mask.
 3. The method of claim 1, wherein the conductive layerand the insulating layer are formed by sputtering, and the amorphoussilicon layer is formed by chemical vapor deposition.
 4. The method ofclaim 1, wherein the conductive layer comprises a material, and theinsulating layer comprises an oxide AOx of the material, where A is thematerial and x is a positive number.
 5. The method of claim 4, whereinthe material comprises at least one selected from the group consistingof aluminum, tin oxide, calcium, and magnesium, and the oxide AOxcomprises at least one selected from the group consisting of Al₂O₃,SnO₂, CaO, and MgO.
 6. The method of claim 1, wherein a thickness of theconductive layer is from about 30 Å to about 100 Å.